Metrology
Here are reported all the tools employable at Else Kooi Laboratory for Metrology. More information, and news will be posted on NIS System.
Cascade 4-probes LCR-Meter
4-probe station with integrated LCR-Meter.
CDE ResMAP 178
4-probe sheet-resistance-meter.
Dataphysics OCA20
Contact Angle Measurement Tool.
Dektak 8 Profilometer
Stylus Profilometer.
Eichhorn MX 203-6
Wafer thickness and bow measurement.
Flexus 2320-S
Wafer bowing and stress meter
FR-scanner
Reflectometer for thin film thickness measurement.
Keyence VK-X250
Optical Profilometer.
Microscopes
Optical microscopes.
Reflex 300
Particle counter.
SEM Hithachi Regulus 8230
Scanning Electron Microscope.
Woollam M-2000UI
Ellipsometer for thin film thickness measurement.