SEM Hitachi Regulus 8230
Function
The Hitachi Regulus 8230 is a Scanning Electron Microscope (SEM). The SEM is used for imaging samples with electrons. The acceleration voltage range is 0.1 – 30 kV. The system is equipped with 3 different electron detectors and can build images by detecting Secondary Electrons (SE) or Back Scatter Electrons (BSE).
Materials and Gasses
NA
Wafer Dimension
Maximum Sample Size = 150 mm; Movable range X,Y = 110 mm. This means that for 150 mm wafers only the centre part can be inspected. The 100 mm wafers can be fully inspected.
Temperature Range
Room Temperature only.
Contamination
A 100 mm wafer holder for Non-Contaminated wafers as well as a 100 mm wafer holder for Contaminated wafers is available.
Restrictions
Minimum z-value = 2.5 mm.
