Dry Etching
Here are reported all the tools employable at Else Kooi Laboratory for thin film Dry Etching. More information, and news will be posted on NIS System.
ALCATEL AMS110
DRIE, dielectrics, metals & polymers etcher.
Drytek Triode 384T
RIE for dielectrics.
Oxford Polaris
ICP-RIE for dielectrics.
PVA Tepla 300
Oxygen plasma ashing for photoresist removal.
PVA Tepla 360M
Oxygen Plasma Ashing for photoresist removal.
SPTS Rapier
Bosch DRIE tool.
SPTS Trikon Omega 201
RIE for Si, Polymers & Metals.