Keyence VK-X250

Function

The Keyence Microscope is a Laser Scanning Confocal Microscope. It uses confocal microscopy to measure the height of the sample. 3D profiles of the surface can be measured and analysed. The microscope can also be used to measure X,Y dimensions. Furthermore, it can visualize details on low contrast images. It can distinguish top and bottom reflections from transparent layers when the layer thickness is larger than 5 micrometres. Measurements on thin transparent layers are difficult. They can result in unreliable results when it cannot clearly determine the reflection on the top of the transparent layer.

Materials and Gasses

NA

Wafer Dimension

X,Y stage movement range is 100 mm. The stage can hold larger samples. Smaller samples are allowed.

Temperature Range

Room Temperature only.

Contamination

Both non-Contaminated and Contaminated samples are allowed. A part of the stage can be exchanged for inspecting contaminated samples.

 

Restrictions

NA