Reflex 300
Function
The Reflex particle counter is used to measure the number of particles on unpatterned wafers. It can measure latex spheres on bare silicon down to 0.15 µm.
Materials and Gasses
NA
Wafer Dimension
Only wafer with diameter of 100 mm.
Temperature Range
Room Temperature only.
Contamination
Non-contaminated wafers only.
Restrictions
Read the instructions in the manual before using a memory stick to store measurement data.
