Woollam M-2000UI
Function
The Woollam ellipsometer is used for measuring the thickness of transparent layers. Ellipsometry particularly useful to measure the thickness of thin transparent layers and to measure the optical constants of a layer. The automated XY stage is used to measure the nonuniformity of the parameters across the wafer.
Materials and Gasses
NA
Wafer Dimension
X,Y stage movement range is 100 mm. The stage can hold larger samples. Smaller samples are allowed.
Temperature Range
Room Temperature only.
Contamination
Both non-Contaminated and Contaminated samples are allowed. To be used with non-contaminated samples. For contaminated samples, cover stage with cleanroom compatible paper before placing the sample.
Restrictions
NA
