Others
Here are reported all the other tools employable at Else Kooi Laboratory. More information, and news will be posted on NIS System.
Avenger Rinser Dryer
Automatic rinser dryer.
Boekel UV Crosslinker
UV light source for polymers crosslinking.
Carbolite Ceramic Oven
High temperature oven in O2 or N2 environment.
Marangoni Cleaning
Marangoni cleaning for native oxide removal.
Spin150 Dryer
Manual single wafer spin dryer.
SPTS Vapor HF
Vapor HF for Oxide etching.
VSParticles Nanomaterial Imprinter
Spark Ablation for Nanoparticles deposition.
Wet Cleaning Line
99% and 69% HNO3 for organic cleaning baths.
Wet Etching line
BHF, HF 0.55%, PES, Al-etch, Acetone etching line.