Film Formation
Here are reported all the tools employable at Else Kooi Laboratory for Thin Film Processing. More information, and news will be posted on NIS System.
Aixtron Black Magic
Graphene Growth Tool.
ASMI Epsilon 2000
Epitaxial Growth tool.
CHA Solution
e-Beam evaporator, PVD.
Novellus Concept 1
TEOS, SiO2, SixNy, SixCy PECVD.
Oxford PlasmaPro 100
SiO2, SixNy, SixCy ICP-PECVD.
Parylene Deposition System 2
Parylene-C CVD.
Tempress Funaces - LPCVD
LPCVD of SixNy, SixCy, TEOS, poly-Si and B.
Tempress Funaces - Oxidation
Oxidation, Annealing and Alloying.
Trikon Sigma 204
Magnetron Sputterer PVD.