FR-scanner Reflectometer
Function
The RF-Scanner reflectometer is used to measure the thickness of transparent layers. The automated XY stage is used to measure the nonuniformity of the parameters across the wafer. The small measurement spot size enables measuring on patterned wafers. The smallest measurement spot is about 25 µm.
Materials and Gasses
NA
Wafer Dimension
X,Y stage movement range is 100 mm. The stage can hold larger samples. Smaller samples are allowed.
Temperature Range
Room Temperature only.
Contamination
Both non-Contaminated and Contaminated samples are allowed. To be used with non-contaminated samples. For contaminated samples, cover stage with cleanroom compatible paper before placing the sample.
Restrictions
NA
