Metrology
Here are reported all the tools employable at Else Kooi Laboratory for Metrology. If you have concerns or questions about any tool you can find the information on the NIS System, or you can contact the EKL Processing Team.
Cascade 4-probes LCR-Meter
4-probe station with integrated LCR-Meter.
CDE ResMAP 178
4-probe sheet-resistance-meter.
Dataphysics OCA20
Contact Angle Measurement Tool.
Dektak 8 Profilometer
Stylus Profilometer.
Eichhorn MX 203-6
Wafer thickness and bow measurement.
Flexus 2320-S
Wafer bowing and stress meter
FR-scanner
Reflectometer for thin film thickness measurement.
Keyence VK-X250
Optical Profilometer.
Microscopes
Optical microscopes.
Reflex 300
Particle counter.
SEM Hithachi Regulus 8230
Scanning Electron Microscope.
Woollam M-2000UI
Ellipsometer for thin film thickness measurement.