Temescal FC-2000

Apparatus

 

FC-2000 evaporation system

Supplier

    

Temescal (division of Ferrotec)

Location

 

P00.330

Main purpose

 

Evaporation

System layout

 

evaporation by e-beam heating (6x 15cc crucible liners)

Power supply

 

10kV SIMBA 2 HV supply (max. 15kW)

Process information

 

“standard” materials: Ti, Al, Au, Ag, Pt, Cr

available on request: Mo, Ag, AuPd, V, Si, etc.

 

Facilities

 

sample can be mounted perpendicular or under a fixed angle

continuous sample rotation (optional)

3cm ion source for (Argon) sputter cleaning

substrate heating by quartz lamp

additional LN2 cooled substrate fixture available

 

Specimen

 

max. 100mm wafer, small pieces allowed

Equipment owner

 

Bas van Asten

+31 642481091

B.vanAsten@tudelft.nl

 

Marinus Fischer (back-up)

m.fischer@tudelft.nl

+31 628906207