Temescal FC-2000
Apparatus | FC-2000 evaporation system | |
Supplier |
| Temescal (division of Ferrotec) |
Location | P00.330 | |
Main purpose | Evaporation | |
System layout | evaporation by e-beam heating (6x 15cc crucible liners) | |
Power supply | 10kV SIMBA 2 HV supply (max. 15kW) | |
Process information | “standard” materials: Ti, Al, Au, Ag, Pt, Cr available on request: Mo, Ag, AuPd, V, Si, etc.
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Facilities | sample can be mounted perpendicular or under a fixed angle continuous sample rotation (optional) 3cm ion source for (Argon) sputter cleaning substrate heating by quartz lamp additional LN2 cooled substrate fixture available
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Specimen | max. 100mm wafer, small pieces allowed | |
Equipment owner | Bas van Asten +31 642481091
Marinus Fischer (back-up) +31 628906207 |