AJA QT
Apparatus | evaporation system | |
Supplier |
| AJA Int. |
Location | P.00.370 | |
Main purpose | Evaporation | |
System layout | evaporation by e-beam heating (6x 15cc crucible liners) | |
Power supply | 10kV Temescal CV-12SLX (max. 12 kW) | |
Process information | “standard” materials: Au, Pd, Co, Ti, Cr | |
Facilities | Deposition under an angle possible | |
Specimen | max. 100mm wafer, small pieces allowed, max 3 mm thick | |
Equipment owner | Marinus Fischer |