AJA QT

Apparatus

  evaporation system

Supplier

    

AJA Int.

Location

 

P.00.370

Main purpose

 

Evaporation

System layout

 

evaporation by e-beam heating (6x 15cc crucible liners)

Power supply

 

10kV Temescal CV-12SLX (max. 12 kW)

Process information

 

“standard” materials:  Au, Pd, Co, Ti, Cr

Facilities

 

Deposition under an angle possible
Argon ion milling in load lock

Specimen

 

max. 100mm wafer, small pieces allowed, max 3 mm thick

Equipment owner

 

Marinus Fischer
m.fischer@tudelft.nl
+31 628906207
Bas van Asten(back-up)
b.vanasten@tudelft.nl
+31 642481091