Avenger Rinser Dryer
Function
The Avenger Rinser Dryer is a tool employed for drying the wafers after being wet chemically processed and rinsed in a water baths. A spray of water will clean the wafers while spinning in order to uniformly rinse the samples. Centrifugal and nitrogen drying is performed in order to properly clean the wafer.
Chemicals
NA
Wafer Dimension
Only 4 inch wafers are allowed. Up to 25 wafers can be loaded for cleaning on one go.
Temperature Range
NA.
Contamination
Only non-Contaminated samples are allowed.
Restrictions
Three different rinser dryer are in EKL wet bench areas, two in the wet cleaning line and one in the wet etching line in order to reduce chemicals and metals cross contamination.
