SUSS MicroTec Mask Aligner
The SUSS mask aligner (or contact aligner) provides manual and assisted alignment as well as exposure of photoresist films. After alignment, wafers are moved into contact (or proximity) with the reticle or photomask that contains the pattern, allowing for 1:1 scale pattern transfers. The contact aligner exposes the entire wafer at once with the ultraviolet portion of the spectral output of a high pressure mercury arc lamp. This spectral output has peaks at the i-line (365 nm) and h-line (405) nm wavelengths, which are used to determine the spectral intensity of the UV light used for exposing wafers.
Contact the tool responsible regarding availability of the Substrate Conformal Imprint Lithography (SCIL) hardware set-up.
Optics:
Wavelength: broadband UV light with peaks at 365 nm and 405 nm (Hg emission spectrum).
Resolution: 1 µm (hard or soft contact mode).
Image scale reduction: none (1X).
Alignment:
Accuracy: 0,5 – 1,0 µm.
Backside alignment (BSA) is available, but only for chucks that have BSA openings or are made of glass.
Default alignment marker positions on X-axis: ±41,5 mm.
Illumination:
Intensity: 20 mW/cm2.
Uniformity: <±1%.
Standard substrates: 4 inch (100 mm) wafers.
Smaller substrates: a (red metal) contaminated chuck is available that is suitable for 10x10 mm, 20x20 mm, or 25x25 mm substrates.
Fragile substrates: a chuck is available that only applies vacuum on the edges of the wafer.
Room Temperature only.
SEMI-clean: there are a collection of chucks available to hold wafers during alignment and exposure. The default chuck may only be used for non-contaminated (i.e. red metals) wafers. To expose a contaminated wafer, you must use one of the designated contaminated chucks.
Reticle / photomask:
Material type: Ultra-low thermal expansion quartz or (white) soda lime glass.
Nominal reticle size: 5 x 5 inch (127 x 127 mm).
Default reticle thickness: 0,090 inch (2,286 mm).
Foil or film masks attached to blank quartz or soda lime 5x5 inch plates can also be used for lower resolution designs.
A number of blank soda lime plates are available for this purpose.
Throughput:
Dependent on user's skills.
