Woollam M-2000

Apparatus

  

M-2000 (XI-210)

Supplier

 

Woollam (https://www.jawoollam.com/download/pdfs/m-2000-brochure.pdf)

Location

 

P.00.351 (TU 14 1/2)

Function/Measurement modes

 

Automated angle (45-90o), 210-1690 nm, 675 wavelengths

Ellipsometry: Ψ (0o-90o) and Δ (0o-360o),

Transmission intensity [%],

Transmission reflection intensity [%]

Reflection Depolarization [%].

Chuck

  Automated XY mapping, 6 inch

System specifications

  Look-down camera, focus probes

 

   

Equipment owner

 

L.N. Schriek

L.N.Schriek@tudelft.nl

0634321293

 

 (back-up)

 

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