Inspection

Bruker FastScan AFM
Atomic force microscope

Bruker Dektak XT
Profilometer

TITAN
aberration-corrected transmission electron microscope (TEM)

FEI NovaNanoSEM
SEM with EDX

Hitachi S4800 SEM
SEM (high-resolutions)

JEOL JEM-1400
TEM 120 kV, with cryo plunger

Optical Microscopes
 

Renishaw Invia Reflex
Raman microscope

Probe Station, MicroXact SPS-1000
Electrical characterisation

Woollam M-2000
Ellipsometer

Flexus (TOHO)
Stress meter

Lucas Labs Pro4
4-point probe

FEI Helios G4 CX
FIB/SEM 

Bruker Dimension D8
XRD 

FR-pOrtable Reflectometer
 

Spotifix Particle Counter
Basic particle counting

Bruker WLI
ContourX-500

Lift-off microscope
Dino-Lite

Hitachi Regulus SEM
ultra-high resolution FE-SEM