Spotific Particle Counter
Apparatus |
| Spotifix Particle Counter |
Supplier | SVS | |
Location | P.00.360 (TU7) | |
Function | Basic particle counting | |
Main purpose | Contamination control | |
Main characteristics | Shearing light scattering particle detection | |
Facilities | Not calibrated, reference measurements only | |
Typical application | Contamination control, defect detection 5..50 µm particles | |
Specimen | Max 4” wafers | |
Equipment owner |
Lodi Schriek +31 634321293 Brian van den Bulk (back-up) +31 634081404 |