Bruker FastScan AFM

Apparatus

  

AFM Dimension FastScan

Supplier

 

Bruker; www.bruker.com

Location

 

P.00.500

Function/Measurement modes

 

Fastscan closed loop scanner head for 35umx35umx3.4um scans (x,y,z) with high scan rate (typically 10-20Hz)

Icon closed loop scanner head for 100umx100umx12um scans (x,y,z) with scan rate of max. 7 Hz

210 mm sample stage

Heated stage -35 degree Celsius to +250 degree Celsius

Bio heater, temperature control to 60 degrees

Multiple measurement modes: Capacitive AFM, PeakForce AFM, Peakforce Tuna, TR-Tuna mode and lots of other measurement modes.

Chuck

 

8 inch motorized chuck with vacuum holders for different sizes of samples

System-specifications

 

100 um scanner, programmable scanning location and sizes, atomic resolution

Specimen

 

Max. 8 inch wafer, small pieces allowed, max. thickness 2 cm

Equipment owner

 

LN.. Schriek

L.N.Schriek@tudelft.nl

0634321293

 

 

 

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