Bruker FastScan AFM
Apparatus |
| AFM Dimension FastScan |
Supplier | Bruker; www.bruker.com | |
Location | P.00.500 | |
Function/Measurement modes | Fastscan closed loop scanner head for 35umx35umx3.4um scans (x,y,z) with high scan rate (typically 10-20Hz) Icon closed loop scanner head for 100umx100umx12um scans (x,y,z) with scan rate of max. 7 Hz 210 mm sample stage Heated stage -35 degree Celsius to +250 degree Celsius Bio heater, temperature control to 60 degrees Multiple measurement modes: Capacitive AFM, PeakForce AFM, Peakforce Tuna, TR-Tuna mode and lots of other measurement modes. | |
Chuck | 8 inch motorized chuck with vacuum holders for different sizes of samples | |
System-specifications | 100 um scanner, programmable scanning location and sizes, atomic resolution | |
Specimen | Max. 8 inch wafer, small pieces allowed, max. thickness 2 cm | |
Equipment owner | LN.. Schriek 0634321293
06 |