Hitachi S4800
Apparatus |
| Hitachi ultra-high resolution FE-SEM (S-4800) |
Supplier | Hitachi; www.hitachi.com | |
Location | P.00.480 | |
Function | Specimen surface inspection | |
Main purpose | Ultra high resolution and Ultra low voltage imaging | |
Main Characteristics | SE images resolution 1.0nm at 15kV 2.0nm at 1kV 1.4nm; at 1kV with Beam Deceleration Stage tilt up to 70o Acceleration voltage 100V to 30kV | |
Facilities | Load-lock, Stage lock, IR Camera, anti-contamination trap(LN2 cooled plate) | |
Specimen | Max. 4 inch in diameter | |
Equipment owner | Hozanna Miro +31 650559998
Lodi Schriek (back-up) +31 634321293 |