Bell Jars
Function
Different Bell Jars are present in EKL, the two different types are for polymer processing, like outgassing, and for silanization of substrates, to increase surface adhesion. Depending on what process you are going to perform you need to choose the correct one.
Materials and Gasses
NA
Wafer Dimension
Standard substrates: 4 inch (100 mm) wafers, 6 inch (150 mm) wafers. Smaller samples can be used.
Temperature Range
Room Temperature.
Contamination
SEMI-clean tool: both for contaminated and non-contaminated wafers.
Remarks
SDS: Before using the Bell Jars for your process read the Technical and the Safety Data Sheet of each chemical or polymer you are going to employ. You can find all these data on the NIS system.
