Salvislab VC20
Function
The Salvislab VC20 is a low temperature vacuum oven for polymer curing. It can be programmed for temperature and time interval.
Materials and Gasses
N2
Wafer Dimension
4 - 6 inch (100 - 150 mm) wafers, smaller samples can be used.
Temperature Range
Room Temperature to 200C.
Contamination
SEMI-clean tool: specific holders for contaminated and non-contaminated samples.
Remarks
NA
