Memmert Oven
Function
The Memmert Oven is a atmospheric pressure and low temperature oven employed for soft, post-exposure and hard bake of photoresists. It can also be employed for polymer curing.
Materials and Gasses
NA
Wafer Dimension
4 and 6 inch (100 and 150 mm) wafers. Smaller samples can be placed inside this oven.
Temperature Range
Room Temperature to 200C.
Contamination
SEMI-clean tool: specific holders for contaminated and non-contaminated samples.
Remarks
NA
