Lithography
Here are reported all the tools employable at Else Kooi Laboratory for Lithography. More information, and news will be posted on NIS System.
ASML PAS5500/80
ASML Stepper for exposure with resolution down to 500nm.
EVG 101 Spraycoater
Spray Coater.
EVG 120
Automatic Coating and Developing Tool.
Manual Coating
Spin Coater and Hot Plates for manual processing.
Manual HMDS
Manual HMDS deposition.
SUSS Mask Aligner
Contact Aligner for exposure with resolution down to 1μm.