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EVG 101 Spraycoater

Function The EVG101 is an ultrasonic spraycoating system. It is able to coat conformal resist films onto extreme topography, where…

Manual Spin Coater

Function The Manual Coating, Baking and Developing has to be employed once working with non-standard photoresists and polymers but also for…

Manual Spin Coater

Function The Manual Coating, Baking and Developing has to be employed once working with non-standard photoresists and polymers but also for…

Bell Jars

Function Different Bell Jars are present in EKL, the two different types are for polymer processing, like outgassing, and for silanization…

Flexus 2320-S

Function The Flexus determines the stress by measuring the substrate curvature before and after thin film deposition. The stress is…

Koyo Curing Oven

Function The KOYO Curing Oven is an high temperature vacuum oven for polymers curing. This tool can be programmed for temperature and time…

Speed Mixer Thinky

Function The Speed Mixer Thinky is a centrifugal mixer station for the outgassing and mixing of phototresist and polymers. This tool allows…

Memmert Oven

Function The Memmert Oven is a atmospheric pressure and low temperature oven employed for soft, post-exposure and hard bake of photoresists.…

Salvislab VC20

Function The Salvislab VC20 is a low temperature vacuum oven for polymer curing. It can be programmed for temperature and time interval.…

Binder Curing Oven

Function The Binder Curing Oven is a atmospheric pressure and low temperature oven employed for polymer curing.It can be programmed for…