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Function The PAS 5500/80 stepper provides automatic alignment and exposure of photoresist films. It exposes one die at a time with i-line or…

/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/asml-stepper

Function The EVG101 is an ultrasonic spraycoating system. It is able to coat conformal resist films onto extreme topography, where…

/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/evg101

Function The Manual Coating, Baking and Developing has to be employed once working with non-standard photoresists and polymers but also for…

/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/manual-spin-coater

Function The Manual Coating, Baking and Developing has to be employed once working with non-standard photoresists and polymers but also for…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/manual-spin-coater

Function Different Bell Jars are present in EKL, the two different types are for polymer processing, like outgassing, and for silanization…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/bell-jars

Function The Flexus determines the stress by measuring the substrate curvature before and after thin film deposition. The stress is…

/en/eemcs/research/facilities/else-kooi-lab/equipment/metrology/flexus-2320-s

Function The KOYO Curing Oven is an high temperature vacuum oven for polymers curing. This tool can be programmed for temperature and time…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/koyo-curing-oven

Function The Speed Mixer Thinky is a centrifugal mixer station for the outgassing and mixing of phototresist and polymers. This tool allows…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/speed-mixer-thinky

Function The Memmert Oven is a atmospheric pressure and low temperature oven employed for soft, post-exposure and hard bake of photoresists.…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/memmert-oven

Function The Salvislab VC20 is a low temperature vacuum oven for polymer curing. It can be programmed for temperature and time interval.…

/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/salvislab-vc20

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