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I. van Hout
Y.M. Blanter
J.A. Warmerdam
- +31 15 27 82707
- J.A.Warmerdam@tudelft.nl
- 32.C-4-560
P.M. Meijvogel-de Koning
- +31 15 27 82903
- P.M.Meijvogel-deKoning@tudelft.nl
- 23.KG 01.165
S.W.H. Eijt
- +31 15 27 89053
- S.W.H.Eijt@tudelft.nl
- 50.02.01.340
Dry Etching
Here are reported all the tools employable at Else Kooi Laboratory for thin film Dry Etching. If you have concerns or questions about any…
/en/eemcs/research/facilities/else-kooi-lab/equipment/dry-etching
Lithography
Here are reported all the tools employable at Else Kooi Laboratory for Lithography. If you have concerns or questions about any tool you can…
/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography
Manual Spin Coater
Function The Manual Coating, Baking and Developing has to be employed once working with non-standard photoresists and polymers but also for…
/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/manual-spin-coater
Bell Jars
Function Different Bell Jars are present in EKL, the two different types are for polymer processing, like outgassing, and for silanization…
/en/eemcs/research/facilities/else-kooi-lab/equipment/polymer-processing/bell-jars
Flexus 2320-S
Function The Flexus determines the stress by measuring the substrate curvature before and after thin film deposition. The stress is…
/en/eemcs/research/facilities/else-kooi-lab/equipment/metrology/flexus-2320-s