E-beam Lithography

A. Positive Tone Resist      
                  
AR-P-6200      
PMMA      
PMMA/MMA      
PMMA/PGMI      
ZEP520A      
               
B. Negative Tone Resists      
               
AR-N-7520      
AR-N-7700      
HSQ      
NEB-22      
               
Other      
               
AR-PC-5000 (electra-92) Conductive polymer      

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