AR-N-7700
Tone | Negative | |
Reference | All resist: https://www.allresist.com/portfolio-item/e-beam-resist-ar-n-7700-series/ | |
Spin coat |
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Prebake | on plate in oven 85oC, 1 min. | |
Exposure | Clearance dose 117 µC/cm2 Si or 130 uC/cm2 metal substrates | |
| Post-exposure bake | on plate in oven 105oC, 2 min | |
Development | MF321 for 1 minute ( vertical) | |
Rinse | 1) MF321 : H2O = 1 : 10 for 15s (2x in a fresh bath) 2) in H20 (2x in a fresh bath) |
