Hitachi Regulus SEM
Apparatus |
| Hitachi ultra-high resolution FE-SEM (Regulus 8230) |
Supplier | Hitachi; www.hitachi.com | |
Location | P00.480 | |
Function | Specimen surface inspection | |
Main Purpose | Ultra high resolution and ultra-low voltage imaging | |
Main Characteristics | SE images resolution | |
Facilities | Load-lock, stage lock, anti-contamination trap (LN2 cooled plate), IR Camera | |
Specimen | Max. 4 inch in diameter | |
Equipment Owner | H. Miro h.miro@tudelft.nl +31 650559998 (back-up) +31 6 |