Bruker WLI
Apparatus |
| ContourX-500 |
Supplier | Bruker | |
Location | P.00.520 (TU51) | |
Function | White ligth interferometer | |
Main Purpose | Profilometer | |
Main Characteristics | Spatial resolution up to 550nm, vertical resolution up to 0.1 nm with phase shift interferometry, vertical resolution independent of objective choice | |
Facilities | Tip/tilt optical head | |
Specimen | Max. thickness 30 mm | |
Equipment Owner | +31 6 L.N. Schriek (back-up) l.n.schriek@tudelft.nl +31 634321293 |