Bruker WLI

Apparatus

  

ContourX-500

Supplier

  Bruker

Location

  P.00.520 (TU51)

Function

 

White ligth interferometer

Main Purpose

  Profilometer

Main Characteristics

  Spatial resolution up to 550nm, vertical resolution up to 0.1 nm with phase shift interferometry, vertical resolution independent of objective choice

Facilities

  Tip/tilt optical head

Specimen

  Max. thickness 30 mm

Equipment Owner

 

+31 6

L.N. Schriek (back-up)
l.n.schriek@tudelft.nl
+31 634321293