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ALCATEL AMS 110

Function The ALCATEL AMS 110 is a ICP-RIE tool that allows both Reactive Ion Etching (RIE) and Deep Reactive Ion Etching (DRIE). This…

/en/eemcs/research/facilities/else-kooi-lab/equipment/dry-etching/alcatel-ams-110

Metrology

Here are reported all the tools employable at Else Kooi Laboratory for Metrology. If you have concerns or questions about any tool you can…

/en/eemcs/research/facilities/else-kooi-lab/equipment/metrology

Manual HMDS

Function The manual HMDS coater is used to increase the hydrophobicity of up to 25 wafers at a time in about 10 minutes. This improves…

/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/manual-hmds

Others

Here are reported all the other tools employable at Else Kooi Laboratory . If you have concerns or questions about any tool you can find…

/en/eemcs/research/facilities/else-kooi-lab/equipment/others