Manual HMDS
Function
The manual HMDS coater is used to increase the hydrophobicity of up to 25 wafers at a time in about 10 minutes. This improves adhesion of photoresist onto these wafers during subsequent coating processes.
Specifications
Gasses: Nitrogen (N2).
Chemicals: Hexamethyldisilazane (HMDS).
Wafer Dimension
Standard substrates: 4 inch (100 mm) wafers.
Temperature Range
Room Temperature only.
Contamination
SEMI-clean tool: There are dedicated cassettes for non-contaminated wafers (black) and contaminated wafers (red).
Remarks
NA
