Gyrset RC8
It has a gyrset system, which is a bell-shaped cover, placed over the chuck and the substrate. During the spinning cycle, the cover closes and all parts of the gyrset rotate synchronously, creating a solvent-saturated ambiance. The confined air inside the cover, turns also synchronously. The result is a resist coat evenly spread over the entire surface without spinning defects. The gyrset makes it possible to spincoat very thin layers of resist without the need of diluting the resist.
Apparatus | Karl Suss RC8 |
Supplier | Karl Suss |
Function | Spincoater |
Main Characteristics | Gyrset system Max. spinspeed with gyrset: 3000 rpm Max. spinspeed without gyrset: 5000 rpm |
Specimen | Max. 8 inch Available chucks: 2" (also used for small pieces) and 4" wafers, 4" and 5" photomasks Max. substrate thickness: 3 mm |
Equipment Owner | Anja van Langen a.k.vanlangen-suurling@tudelft.nl +31-15-2787198 |