Gyrset RC8

It has a gyrset system, which is a bell-shaped cover, placed over the chuck and the substrate. During the spinning cycle, the cover closes and all parts of the gyrset rotate synchronously, creating a solvent-saturated ambiance. The confined air inside the cover, turns also synchronously. The result is a resist coat evenly spread over the entire surface without spinning defects. The gyrset makes it possible to spincoat very thin layers of resist without the need of diluting the resist. 

ApparatusKarl Suss RC8 
SupplierKarl Suss 
FunctionSpincoater
Main CharacteristicsGyrset system
Max. spinspeed with gyrset: 3000 rpm
Max. spinspeed without gyrset: 5000 rpm

Specimen

Max. 8 inch
Available chucks: 2" (also used for small pieces) and 4"
wafers, 4" and 5" photomasks
Max. substrate thickness: 3 mm
Equipment OwnerAnja van Langen
a.k.vanlangen-suurling@tudelft.nl
+31-15-2787198