Publications

• 2023

  Coating layer on samples with roughness

  numerical study for coherent Fourier scatterometry
  D. Kolenov / S. F. Pereira

• 2023

  Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples

  Jila Rafighdoost / Dmytro Kolenov / Silvania F. Pereira

• 2023

  Coherent Fourier scatterometry

  a holistic tool for inspection of isolated particles or defects on gratings
  Anubhav Paul / Dmytro Kolenov / Thomas Scholte / Silvania F. Pereira

• 2022

  Coherent Fourier Scatterometry for sensitive detection of subwavelength structures and particles

  D. Kolenov

• 2022

  Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography

  Haoyang Yin / Dmytro Kolenov / Silvania F. Pereira

• More publications