D. Kolenov MSc
D. Kolenov MSc
Contact
Expertise
Publicaties
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2023
Coating layer on samples with roughness
numerical study for coherent Fourier scatterometry
D. Kolenov / S. F. Pereira -
2023
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples
Jila Rafighdoost / Dmytro Kolenov / Silvania F. Pereira
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2023
Coherent Fourier scatterometry
a holistic tool for inspection of isolated particles or defects on gratings
Anubhav Paul / Dmytro Kolenov / Thomas Scholte / Silvania F. Pereira -
2022
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2022
Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography
Haoyang Yin / Dmytro Kolenov / Silvania F. Pereira
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