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E. (Elisa) Atza
- +31 15 27 88588
- E.Atza@tudelft.nl
- 36.HB 03.240
M.A.A.M. Adly
M.A. (Mario) Garzon Oviedo
F. (Fang) Fang
- F.Fang@tudelft.nl
- 36.HB 03.260
O.A.C. Hoes
- +31 15 27 84772
- O.A.C.Hoes@tudelft.nl
- 23.HG 4.90
A.P. (Arjan) van Dijke
G.T.M. van de Sande
H.F.D. Kool
- +31 15 27 81232
- H.F.D.Kool@tudelft.nl
- 32.C-3-510
M. (Monique) van der Toorn-Fennema
Dry Etching
Here are reported all the tools employable at Else Kooi Laboratory for thin film Dry Etching. More information, and news will be posted on…
/en/eemcs/research/facilities/else-kooi-lab/equipment/dry-etching