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N. (Nils) Barfknecht
ALCATEL AMS 110
Function The ALCATEL AMS 110 is a ICP-RIE tool that allows both Reactive Ion Etching (RIE) and Deep Reactive Ion Etching (DRIE). This…
/en/eemcs/research/facilities/else-kooi-lab/equipment/dry-etching/alcatel-ams-110
Manual HMDS
Function The manual HMDS coater is used to increase the hydrophobicity of up to 25 wafers at a time in about 10 minutes. This improves…
/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/manual-hmds
M.G.M. (Mirjam) Harmelink
N. Stringa
M. Gavioli
M.Y. (Yousef) Maknoon
I. van Hout
Y.M. Blanter
J.A. Warmerdam
- +31 15 27 82707
- J.A.Warmerdam@tudelft.nl
- 32.C-4-560