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C. (Claudia) Chianese
A.M. (Fred) Herrebout
F. (Florentia) Kavoura
- F.Kavoura@tudelft.nl
- 23.S2 2.54
S.P. van Zoest
- +31 15 27 87446
- S.P.vanZoest@tudelft.nl
- 08.01.West.620
N. (Nils) Barfknecht
ALCATEL AMS 110
Function The ALCATEL AMS 110 is a ICP-RIE tool that allows both Reactive Ion Etching (RIE) and Deep Reactive Ion Etching (DRIE). This…
/en/eemcs/research/facilities/else-kooi-lab/equipment/dry-etching/alcatel-ams-110
Manual HMDS
Function The manual HMDS coater is used to increase the hydrophobicity of up to 25 wafers at a time in about 10 minutes. This improves…
/en/eemcs/research/facilities/else-kooi-lab/equipment/lithography/manual-hmds