AJA MB
Apparatus | Evaporation system | |
Supplier |
| AJA int. |
Location | P.00.370 | |
Main purpose | Evaporation | |
System layout | evaporation by e-beam heating (6x 15cc crucible liners) | |
Power supply | 10kV Temescal CV-6SLX (max. 6 kW) | |
Process information | “standard” materials: Pd, Pt, Ti, (Ir) | |
Facilities | Deposition under an angle possible | |
Specimen | max. 100mm wafer, small pieces allowed, max 3 mm thick | |
Equipment owner | Marinus Fischer |