Dektak Profilometer
Function
The Dektak 8 is a stylus profilometer. Line scans are made on the sample surface to measure surface topography features like step heights and roughness. The styles has a tip radius of 12.5 µm. The automatic sample stage movement has a range of 200x200 mm.
Materials and Gasses
NA
Wafer Dimension
Maximum sample size is 200 mm. Smaller samples are allowed.
Temperature Range
Room Temperature only.
Contamination
Two dedicated tools, one for Non-contaminated wafers, and one for Contaminated samples.
Restrictions
NA
