Publications

• 2015

  Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition

  M Scotuzzi / MJ Kamerbeek / A Goodyear / M Cooke / CW Hagen

• 2015

  Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition

  M Scotuzzi / MJ Kamerbeek / A Goodyear / M Cooke / CW Hagen

• 2009

  Electron beam induced deposited etch masks

  CTH Heerkens / MJ Kamerbeek / WF van Dorp / CW Hagen / J Hoekstra

• More publications