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Keyence VK-X250

Function The Keyence Microscope is a Laser Scanning Confocal Microscope. It uses confocal microscopy to measure the height of the sample. 3D…

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Wet Etching line

Function The Wet Etching line is a series of pre-made chemical baths employed for the wet chemical etching of semiconductors (poly-Si),…

/en/eemcs/research/facilities/else-kooi-lab/equipment/others/wet-etching-line

SEM Hitachi Regulus 8230

Function The Hitachi Regulus 8230 is a Scanning Electron Microscope (SEM). The SEM is used for imaging samples with electrons. The…

/en/eemcs/research/facilities/else-kooi-lab/equipment/metrology/sem-hitachi-regulus-8230

SPTS Vapor HF

Function The SPTS Vapor HF is used to etch oxides layers, usually employed as sacrificial layers, to release structures via dry vapor…

/en/eemcs/research/facilities/else-kooi-lab/equipment/others/spts-vapor-hf