PMMA for DUV Recipe
Application
PMMA used for recipe below: 3% 2041 PMMA (350K) in xylene
tone | positive |
special | also appliable for e-beam use |
reference | |
spin coat | 100nm @ 5000 rpm |
pre bake | 2 minutes on hotplate @175°C (for thicknesses <500nm) or 30 minutes on hotplate @175°C (for thicknesses >500nm) |
exposure time | 1 h |
development | 60 s in MIBK : IPA = 1 : 3 |
stopping | >120 s in IPA |