Research collaboration | Faster and more reliable electron imaging

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Project in the news

KIC grant awarded to improve imaging of semiconductor chips

The Dutch Research Council (NWO) has awarded a grant to research on more efficient production of even smaller computer chips in the KIC call ‘Demand-driven Partnerships for Consortia’. Researchers from Delft University of Technology and ARCNL are collaborating with ASML in order to inspect computer chips more precisely and faster with help of electrons. The Knowledge and Innovation Covenant (KIC) research programme stands for pioneering innovative solutions with social and economic impact. NWO funds the research with almost 2 million euros, ASML contributes with over 2.3 million co-funding.

Electron imaging program receives funding from NWO KIC call

NWO announced that ARCNL, Delft University and ASML will receive funding for their research program ‘Fundamentals of Electron Beam Inspection and Metrology’. ARCNL group leaders Paul Planken and Roland Bliem are participating.
The program is enabled by the call ‘Demand-driven Partnerships for Consortia’, which is part of NWO’s Knowledge and Innovation Covenant (KIC) research program. The total budget amounts to 4 million euro, of which 2.3 million euro is funded by ASML.