Publicaties

• 2024

  A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material

  Jiarui Mo / Shreyas Shankar / Roberto Pezone / Guoqi Zhang / Sten Vollebregt

• 2024

  Correction to

  Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)
  Roberto Pezone / Sebastian Anzinger / Gabriele Baglioni / Hutomo Suryo Wasisto / Pasqualina M. Sarro / Peter G. Steeneken / Sten Vollebregt

• 2024

  Effect of air-loading on the performance limits of graphene microphones

  R. Pezone / G. Baglioni / C. van Ruiten / S. Anzinger / H. S. Wasisto / P. M. Sarro / P. G. Steeneken / S. Vollebregt

• 2024

  Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

  Roberto Pezone / Sebastian Anzinger / Gabriele Baglioni / Hutomo Suryo Wasisto / Pasqualina M. Sarro / Peter G. Steeneken / Sten Vollebregt

• 2023

  High-performance wafer-scale transfer-free graphene microphones

  Roberto Pezone / G. Baglioni / Pasqualina M. Sarro / Peter G. Steeneken / Sten Vollebregt

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