Drs.ing. H. Schellevis
Drs.ing. H. Schellevis
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Publicaties
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2014
Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C
S Vollebregt / FD Tichelaar / H Schellevis / CIM Beenakker / R Ishihara
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2014
Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications
N Golshani / V Mohammadi / H Schellevis / CIM Beenakker / R Ishihara
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2013
Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
S Vollebregt / H Schellevis / CIM Beenakker / R Ishihara
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2013
Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode
AT Tran / TSY Moh / G Pandraud / H Schellevis / AB Akhnoukh / PM Sarro
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2013
Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators
AT Tran / O Wunnicke / G Pandraud / MD Nguyen / H Schellevis / PM Sarro
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